Dataset: Synthesis of epitaxial TaO₂ thin films on Al₂O₃ by suboxide molecular-beam epitaxy and thermal laser epitaxy

Authors: Yorick A. Birkhölzer ¹, Anna S. Park ^1,2, Noah Schnitzer ^1,3, Jeffrey Z. Kaaret ⁴, Benjamin Z. Gregory ¹, Tomas A. Kraay ¹, Tobias Schwaigert ^1,2, Matthew R. Barone ^1,2, Brendan D. Faeth ², Felix V.E. Hensling ⁵, Iris C.G. van den Bosch ⁶, Ellen M. Kiens ⁶, Christoph Baeumer ⁶, Enrico Bergamasco ⁷, Markus Grüninger ⁷, Alexander Bordovalos ^8,9, Suresh Chaulagain ^8,9, Nikolas J. Podraza ^8,9, Waldemar Tokarz ¹⁰, Wojciech Tabis ¹⁰, Matthew J. Wahila ¹¹, Suchismita Sarker ¹², Christopher J. Pollock ¹², Shun-Li Shang ¹³, Zi-Kui Liu ¹³, Nongnuch Artrith ¹⁴, Frank M.F. de Groot ¹⁴, Nicole A. Benedek ¹, Andrej Singer ¹, David A. Muller ^2,3,4, Darrell G. Schlom ^1,2,3,15

Author affiliations:
¹:Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, USA
²:Platform for the Accelerated Realization, Analysis, and Discovery of Interface Materials (PARADIM), Cornell University, Ithaca, New York 14853, USA
³:Kavli Institute at Cornell for Nanoscale Science, Ithaca, New York 14853, USA
⁴:School of Applied and Engineering Physics, Cornell University, Ithaca, New York 14853, USA
⁵:Max Planck Institute for Solid State Research, 70569 Stuttgart, Germany
⁶:MESA+ Institute for Nanotechnology, University of Twente, 7500 AE, Enschede, The Netherlands
⁷:Institute of Physics II, University of Cologne, 50937 Cologne, Germany
⁸:Department of Physics and Astronomy, University of Toledo, Toledo, Ohio 43606, USA
⁹:Wright Center for Photovoltaics Innovation and Commercialization, University of Toledo, Toledo, Ohio 43606, USA
¹⁰:Faculty of Physics and Applied Computer Science, AGH University of Krakow, 30-059, Krakow, Poland
¹¹:Analytical and Diagnostics Lab, Binghamton University, State University of New York, Binghamton, New York 13902,USA
¹²:Cornell High Energy Synchrotron Source, Wilson Laboratory, Cornell University, Ithaca, New York 14853, USA
¹³:Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802,USA
¹⁴:Debye Institute for Nanomaterials Science, Utrecht University, 3584 CG, Utrecht, The Netherlands
¹⁵:Leibniz-Institut für Kristallzüchtung, Max-Born-Str. 2, 12489 Berlin, Germany

Here we share the log files that were generated during the epitaxial growth of TaO₂ thin films on r-plane sapphire by suboxide MBE. Additionally, we also share AFM and RHEED images as well as XAS, XPS, XRD, and STEM-EELS data.