Paper doi:
1: https://doi.org/10.1116/6.0002205
The Ba𝑛+1In𝑛O2.5𝑛+1 films were grown by suboxide molecular-beam epitaxy where the indium is provided by a molecular beam of indium-suboxide [In2O (g)]. To facilitate ex situ characterization of the highly hygroscopic barium indate films, a capping layer of amorphous SiO2 was deposited before air exposure. The structural quality of the films was assessed by x-ray diffraction and reflective high-energy electron diffraction The data presented here represents the MBE growth logs and the corresponding structural characterization in the form of x-ray diffraction and reflective high-energy electron diffraction.