Molecular-beam epitaxy (MBE) is the gold standard for the epitaxial growth of complex oxides with the best material properties as determined by respective figures of merit. Unfortunately, once more than one cation is involved in the material desired, MBE growth often becomes plagued by difficulties in stoichiometry control. Instead of relying on a quartz crystal microbalance to measure the fluxes of the individual molecular beams, which lacks accuracy, or reflection high-energy electron diffraction oscillations of the targeted multication oxide in layer-by-layer growth, which lacks general applicability, here, we describe a canonical approach based on the growth of films of the constituent binary oxides or metals individually for cation flux calibration. This method can calibrate the flux of each molecular beam with an absolute accuracy of 1%. After describing the growth parameters of binary oxides or metals enabling the individual fluxes of 39 elements of the periodic table to be determined, we demonstrate the efficacy of this approach by applying it to the growth of the quaternary ferromagnetic metal La0.5Sr0.5CoO3−δ to achieve films with transport properties rivaling the best reported using thin-film growth techniques providing stoichiometric transfer.
RHEED | ||
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Item | Type | File |
Al2O3 1-102 homo | zipped folder | Al2O3 1-102 homo.zip |
beta Ga2O3 Al2O3 001 | zipped folder | beta Ga2O3 Al2O3 001.zip |
beta Ga2O3 Al2O3 001 | zipped folder | CaO (100):MgO (100).zip |
beta Ga2O3 Al2O3 001 | zipped folder | CeO2 (111):YSZ (111).zip |
Co3O4 (100) MgAl2O4 (100) | zipped folder | Co3O4 (100) MgAl2O4 (100).zip |
Cr2O3 c-Al2O3 | zipped folder | Cr2O3 c-Al2O3.zip |
Cr2O3 r-Al2O3 | zipped folder | Cr2O3 r-Al2O3.zip |
Dy2O3 YSZ 111 | zipped folder | Dy2O3 YSZ 111.zip |
Fe2O3 csaplow | zipped folder | Fe2O3 csaplow.zip |
Fe3O4 (100)- MgO (100) | zipped folder | Fe3O4 (100)- MgO (100).zip |
In2O3 Al2O3 001 | zipped folder | In2O3 Al2O3 001.zip |
IrO2 (110)-TiO2 (110) | zipped folder | IrO2 (110)-TiO2 (110).zip |
La2O3 111 YSZ | zipped folder | La2O3 111 YSZ.zip |
Lu2O3 (111)-YSZ (111) | zipped folder | Lu2O3 (111)-YSZ (111).zip |
MgO Fe3O4 MgO 100 | zipped folder | MgO Fe3O4 MgO 100.zip |
Mn3O4 (001)-MgAl2O4 (100) | zipped folder | Mn3O4 (001)-MgAl2O4 (100).zip |
Mn3O4 (001)-MgAl2O4 (100) | zipped folder | NbO2 (110):MgF2 (110).zip |
Nd2O3 YSZ 111 | zipped folder | Nd2O3 YSZ 111.zip |
NiO MgO 100 | zipped folder | NiO MgO 100.zip |
NiO MgO 100 | zipped folder | Pd (111):YSZ (111).zip |
Pt Al2O3 0001 | zipped folder | Pt Al2O3 0001.zip |
Rh2O3 csaplow | zipped folder | Rh2O3 csaplow.zip |
Sc2O3 YSZ 111 | zipped folder | Sc2O3 YSZ 111.zip |
Sm2O3 YSZ 111 | zipped folder | Sm2O3 YSZ 111.zip |
SrO (100)-YSZ (100) | zipped folder | SrO (100)-YSZ (100).zip |
TiO2 (110)-TiO2 (110) | zipped folder | TiO2 (110)-TiO2 (110).zip |
VO2 TiO2 110 | zipped folder | VO2 TiO2 110.zip |
Y_Ba_Pr_Cu | zipped folder | Y_Ba_Pr_Cu.zip |
XRD | ||
Item | Type | File |
beta Ga2O3 Al2O3 001 | zipped folder | beta Ga2O3 Al2O3 001.zip |
beta Ga2O3 Al2O3 001 | zipped folder | CaO (100):MgO (100).zip |
beta Ga2O3 Al2O3 001 | zipped folder | CeO2 (111):YSZ (111).zip |
Co3O4 (100) MgAl2O4 (100) | zipped folder | Co3O4 (100) MgAl2O4 (100).zip |
Cr2O3 c-Al2O3 | zipped folder | Cr2O3 c-Al2O3.zip |
Cr2O3 r-Al2O3 | zipped folder | Cr2O3 r-Al2O3.zip |
Dy2O3 YSZ 111 | zipped folder | Dy2O3 YSZ 111.zip |
Fe2O3 csaplow | zipped folder | Fe2O3 csaplow.zip |
Fe3O4 (100)- MgO (100) | zipped folder | Fe3O4 (100)- MgO (100).zip |
In2O3 Al2O3 001 | zipped folder | In2O3 Al2O3 001.zip |
IrO2 (110)-TiO2 (110) | zipped folder | IrO2 (110)-TiO2 (110).zip |
La2O3 111 YSZ | zipped folder | La2O3 111 YSZ.zip |
Lu2O3 (111)-YSZ (111) | zipped folder | Lu2O3 (111)-YSZ (111).zip |
MgO Fe3O4 MgO 100 | zipped folder | MgO Fe3O4 MgO 100.zip |
Mn3O4 (001)-MgAl2O4 (100) | zipped folder | Mn3O4 (001)-MgAl2O4 (100).zip |
Mn3O4 (001)-MgAl2O4 (100) | zipped folder | NbO2 (110):MgF2 (110).zip |
Nd2O3 YSZ 111 | zipped folder | Nd2O3 YSZ 111.zip |
Nd2O3 YSZ 111 | zipped folder | Pd (111):YSZ (111).zip |
Pt Al2O3 0001 | zipped folder | Pt Al2O3 0001.zip |
Rh2O3 csaplow | zipped folder | Rh2O3 csaplow.zip |
Sc2O3 YSZ 111 | zipped folder | Sc2O3 YSZ 111.zip |
Sm2O3 YSZ 111 | zipped folder | Sm2O3 YSZ 111.zip |
SnO2 TiO2 (110) | zipped folder | SnO2 TiO2 (110).zip |
SrO (100)-YSZ (100) | zipped folder | SrO (100)-YSZ (100).zip |
VO2 TiO2 110 | zipped folder | VO2 TiO2 110.zip |
Y_Ba_Pr_Cu | zipped folder | Y_Ba_Pr_Cu.zip |