|
Item Name |
Size |
Last Modified |
|
|
AirPressureAlarm.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
|
|
AirPressureAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
AirPressureAlarm.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
AirPressureAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
AirPressureAlarm.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
Air_pressure_low.Value.txt |
65 B |
8/5/2020, 11:47:12 AM |
|
|
Al_base.Derivative.txt |
40 B |
8/5/2020, 11:47:12 AM |
|
|
Al_base.DeviceMax.txt |
51 B |
8/5/2020, 11:47:12 AM |
|
|
Al_base.DeviceMin.txt |
51 B |
8/5/2020, 11:47:12 AM |
|
|
Al_base.Integral.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
Al_base.Measured.txt |
115.99 KB |
8/5/2020, 11:47:12 AM |
|
|
Al_base.OutputPercent.txt |
41 B |
8/5/2020, 11:47:12 AM |
|
|
Al_base.Proportional.txt |
50 B |
8/5/2020, 11:47:12 AM |
|
|
Al_base.RampRate.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
Al_base.Setpoint.txt |
42 B |
8/5/2020, 11:47:12 AM |
|
|
Al_base.ShutterStatus.txt |
74 B |
8/5/2020, 11:47:12 AM |
|
|
Al_base.WorkingSetpoint.txt |
42 B |
8/5/2020, 11:47:12 AM |
|
|
BaratronHeater.Derivative.txt |
40 B |
8/5/2020, 11:47:12 AM |
|
|
BaratronHeater.DeviceMax.txt |
47 B |
8/5/2020, 11:47:12 AM |
|
|
BaratronHeater.DeviceMin.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
BaratronHeater.Integral.txt |
47 B |
8/5/2020, 11:47:12 AM |
|
|
BaratronHeater.Measured.txt |
18.57 KB |
8/5/2020, 11:47:12 AM |
|
|
BaratronHeater.OutputPercent.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
BaratronHeater.Proportional.txt |
47 B |
8/5/2020, 11:47:12 AM |
|
|
BaratronHeater.RampRate.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
BaratronHeater.Setpoint.txt |
50 B |
8/5/2020, 11:47:12 AM |
|
|
BaratronHeater.WorkingSetpoint.txt |
50 B |
8/5/2020, 11:47:12 AM |
|
|
BaseFlangeShutter1.Value.txt |
72 B |
8/5/2020, 11:47:12 AM |
|
|
BaseFlangeShutter1_Closed.Value.txt |
82 B |
8/5/2020, 11:47:12 AM |
|
|
BaseFlangeShutter1_Open.Value.txt |
73 B |
8/5/2020, 11:47:12 AM |
|
|
BaseFlangeShutter2.Value.txt |
71 B |
8/5/2020, 11:47:12 AM |
|
|
BaseFlangeShutter2_Closed.Value.txt |
82 B |
8/5/2020, 11:47:12 AM |
|
|
BaseFlangeShutter2_Open.Value.txt |
73 B |
8/5/2020, 11:47:12 AM |
|
|
BaseFlangeShutter3.Value.txt |
71 B |
8/5/2020, 11:47:12 AM |
|
|
BaseFlangeShutter3_Closed.Value.txt |
82 B |
8/5/2020, 11:47:12 AM |
|
|
BaseFlangeShutter3_Open.Value.txt |
76 B |
8/5/2020, 11:47:12 AM |
|
|
BaseFlangeShutter4.Value.txt |
72 B |
8/5/2020, 11:47:12 AM |
|
|
BaseFlangeShutter4_Closed.Value.txt |
82 B |
8/5/2020, 11:47:12 AM |
|
|
BaseFlangeShutter4_Open.Value.txt |
73 B |
8/5/2020, 11:47:12 AM |
|
|
Bi_base.Derivative.txt |
50 B |
8/5/2020, 11:47:12 AM |
|
|
Bi_base.DeviceMax.txt |
50 B |
8/5/2020, 11:47:12 AM |
|
|
Bi_base.DeviceMin.txt |
40 B |
8/5/2020, 11:47:12 AM |
|
|
Bi_base.Integral.txt |
50 B |
8/5/2020, 11:47:12 AM |
|
|
Bi_base.Measured.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
Bi_base.OutputPercent.txt |
41 B |
8/5/2020, 11:47:12 AM |
|
|
Bi_base.Proportional.txt |
51 B |
8/5/2020, 11:47:12 AM |
|
|
Bi_base.RampRate.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
Bi_base.Setpoint.txt |
41 B |
8/5/2020, 11:47:12 AM |
|
|
Bi_base.ShutterStatus.txt |
74 B |
8/5/2020, 11:47:12 AM |
|
|
Bi_base.WorkingSetpoint.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
CommsAlarm.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
|
|
CommsAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
CommsAlarm.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
CommsAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
CommsAlarm.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
CoolingWaterTempAlarmActive.Value.txt |
61 B |
8/5/2020, 11:47:12 AM |
|
|
Cryo1_NOT_OK.Status.txt |
105 B |
8/5/2020, 11:47:12 AM |
|
|
Cryo1_NOT_OK.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
Cryo1_NOT_OK.count.txt |
65 B |
8/5/2020, 11:47:12 AM |
|
|
Cryo1_NOT_OK.lastmod.txt |
68 B |
8/5/2020, 11:47:12 AM |
|
|
Cryo1_NOT_OK.state.txt |
65 B |
8/5/2020, 11:47:12 AM |
|
|
Cryo1_OverTempAlarm.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
|
|
Cryo1_OverTempAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
Cryo1_OverTempAlarm.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
Cryo1_OverTempAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
Cryo1_OverTempAlarm.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
Cryo1_gate_closed.Value.txt |
89 B |
8/5/2020, 11:47:12 AM |
|
|
DOPICU_MBEPressure.Reading.txt |
3.06 KB |
8/5/2020, 11:47:12 AM |
|
|
DOPICU_N2Flow.Reading.txt |
3.09 KB |
8/5/2020, 11:47:12 AM |
|
|
DOPICU_O2Flow.Reading.txt |
3.11 KB |
8/5/2020, 11:47:12 AM |
|
|
DOPICU_PumpPressure.Reading.txt |
1.87 KB |
8/5/2020, 11:47:12 AM |
|
|
DOPICU_StillPressure.Reading.txt |
944 B |
8/5/2020, 11:47:12 AM |
|
|
DriverAlarm.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
|
|
DriverAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
DriverAlarm.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
DriverAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
DriverAlarm.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
EBeam_zone.Derivative.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
EBeam_zone.DeviceMax.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
EBeam_zone.DeviceMin.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
EBeam_zone.Integral.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
EBeam_zone.Measured.txt |
50 B |
8/5/2020, 11:47:12 AM |
|
|
EBeam_zone.OutputPercent.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
EBeam_zone.Proportional.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
EBeam_zone.RampRate.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
EBeam_zone.Setpoint.txt |
50 B |
8/5/2020, 11:47:12 AM |
|
|
EBeam_zone.ShutterStatus.txt |
74 B |
8/5/2020, 11:47:12 AM |
|
|
EBeam_zone.WorkingSetpoint.txt |
50 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_base.Derivative.txt |
40 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_base.DeviceMax.txt |
51 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_base.DeviceMin.txt |
51 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_base.Integral.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_base.Measured.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_base.OutputPercent.txt |
41 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_base.Proportional.txt |
50 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_base.RampRate.txt |
47 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_base.Setpoint.txt |
42 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_base.WorkingSetpoint.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_tip.Derivative.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_tip.DeviceMax.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_tip.DeviceMin.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_tip.Integral.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_tip.Measured.txt |
50 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_tip.OutputPercent.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_tip.Proportional.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_tip.RampRate.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_tip.Setpoint.txt |
50 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_tip.ShutterStatus.txt |
74 B |
8/5/2020, 11:47:12 AM |
|
|
Fe_tip.WorkingSetpoint.txt |
50 B |
8/5/2020, 11:47:12 AM |
|
|
GM1Cryo1Temp.Reading.txt |
153.9 KB |
8/5/2020, 11:47:12 AM |
|
|
GM1WagoAlarm.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
|
|
GM1WagoAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1WagoAlarm.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM1WagoAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1WagoAlarm.state.txt |
55 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_Building_Supply.Reading.txt |
5.96 KB |
8/5/2020, 11:47:12 AM |
|
|
GM1_Cryo1_OK.Value.txt |
83 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_Cryo1_OverT.Value.txt |
70 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_Cryo1_gate.Value.txt |
87 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_CryoComp_Return.Reading.txt |
3.77 KB |
8/5/2020, 11:47:12 AM |
|
|
GM1_CryoComp_Supply.Reading.txt |
3.14 KB |
8/5/2020, 11:47:12 AM |
|
|
GM1_IonGaugeAtSP1.Value.txt |
76 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_IonGaugeAtSP2.Value.txt |
76 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_IonGauge_NotAtSP1.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_IonGauge_NotAtSP1.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_IonGauge_NotAtSP1.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_IonGauge_NotAtSP1.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_IonGauge_NotAtSP1.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_IonGauge_NotAtSP2.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_IonGauge_NotAtSP2.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_IonGauge_NotAtSP2.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_IonGauge_NotAtSP2.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_IonGauge_NotAtSP2.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_KCell2ndSetpoint.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_KCell2ndSetpoint.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_KCell2ndSetpoint.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_KCell2ndSetpoint.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_KCell2ndSetpoint.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_Leg1_Return.Reading.txt |
3.75 KB |
8/5/2020, 11:47:12 AM |
|
|
GM1_Leg1_Supply.Reading.txt |
2.65 KB |
8/5/2020, 11:47:12 AM |
|
|
GM1_Leg2_Return.Reading.txt |
3.5 KB |
8/5/2020, 11:47:12 AM |
|
|
GM1_Leg2_Supply.Reading.txt |
3.22 KB |
8/5/2020, 11:47:12 AM |
|
|
GM1_NoPlatenAlarm.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_NoPlatenAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_NoPlatenAlarm.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_NoPlatenAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_NoPlatenAlarm.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_OzoneGen_Return.Reading.txt |
3.08 KB |
8/5/2020, 11:47:12 AM |
|
|
GM1_OzoneGen_Supply.Reading.txt |
3.62 KB |
8/5/2020, 11:47:12 AM |
|
|
GM1_PlatenTransferAlarm.Control.txt |
109 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_PlatenTransferAlarm.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_PlatenTransferAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_PlatenTransferAlarm.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_PlatenTransferAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_PlatenTransferAlarm.state.txt |
55 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_Reactor_Return.Reading.txt |
4.04 KB |
8/5/2020, 11:47:12 AM |
|
|
GM1_Reactor_Supply.Reading.txt |
3.76 KB |
8/5/2020, 11:47:12 AM |
|
|
GM1_RecipeAbort.Value.txt |
71 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_RecipeRunning.Control.txt |
109 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_RecipeRunning.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_RecipeRunning.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_RecipeRunning.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_RecipeRunning.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_RecipeRunning.state.txt |
55 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_Room_Temperature.Reading.txt |
4.03 KB |
8/5/2020, 11:47:12 AM |
|
|
GM1_ShutterFailureAlarm.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_ShutterFailureAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_ShutterFailureAlarm.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_ShutterFailureAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_ShutterFailureAlarm.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_Substrate2ndSetpoint.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_Substrate2ndSetpoint.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_Substrate2ndSetpoint.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_Substrate2ndSetpoint.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_Substrate2ndSetpoint.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_Turbo1_gate.Value.txt |
71 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_Turbo_Return.Reading.txt |
3.52 KB |
8/5/2020, 11:47:12 AM |
|
|
GM1_Turbo_Supply.Reading.txt |
3.3 KB |
8/5/2020, 11:47:12 AM |
|
|
GM1_Vacuum.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_Vacuum.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_Vacuum.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_Vacuum.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_Vacuum.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM1_eGun_Return.Reading.txt |
3.29 KB |
8/5/2020, 11:47:12 AM |
|
|
GM1_eGun_Supply.Reading.txt |
3.76 KB |
8/5/2020, 11:47:12 AM |
|
|
GMLockForTransfer.Value.txt |
109 B |
8/5/2020, 11:47:12 AM |
|
|
GM_Bake_Mode.Value.txt |
78 B |
8/5/2020, 11:47:12 AM |
|
|
GM_Turbo1_At_Speed.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
|
|
GM_Turbo1_At_Speed.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM_Turbo1_At_Speed.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM_Turbo1_At_Speed.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM_Turbo1_At_Speed.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM_Turbo1_Foreline_AtSP.Value.txt |
91 B |
8/5/2020, 11:47:12 AM |
|
|
GM_Turbo1_Foreline_NotAtSP.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
|
|
GM_Turbo1_Foreline_NotAtSP.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM_Turbo1_Foreline_NotAtSP.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM_Turbo1_Foreline_NotAtSP.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM_Turbo1_Foreline_NotAtSP.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM_Turbo1_NOT_OK.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
|
|
GM_Turbo1_NOT_OK.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
|
|
GM_Turbo1_NOT_OK.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
|
|
GM_Turbo1_NOT_OK.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
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GM_Turbo1_NOT_OK.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
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GM_Turbo1_NotAtSpeed.Value.txt |
82 B |
8/5/2020, 11:47:12 AM |
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GM_Turbo1_OK.Value.txt |
67 B |
8/5/2020, 11:47:12 AM |
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GM_Turbo1_closed.Value.txt |
72 B |
8/5/2020, 11:47:12 AM |
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GaugeRangeAlarm.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
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GaugeRangeAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
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GaugeRangeAlarm.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
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GaugeRangeAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
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GaugeRangeAlarm.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
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Growth module.Cryo1.CryoOK.txt |
83 B |
8/5/2020, 11:47:12 AM |
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Growth module.Cryo1.GateValve.Get.txt |
102 B |
8/5/2020, 11:47:12 AM |
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Growth module.Cryo1.GateValve.Set.txt |
87 B |
8/5/2020, 11:47:12 AM |
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Growth module.DiscreteStage.Get.txt |
127 B |
8/5/2020, 11:47:12 AM |
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Growth module.DiscreteStage.Set.txt |
89 B |
8/5/2020, 11:47:12 AM |
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Growth module.GM1_VacuumAlarm.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
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Growth module.GM1_VacuumAlarm.ackd.txt |
40 B |
8/5/2020, 11:47:12 AM |
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Growth module.GM1_VacuumAlarm.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
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Growth module.GM1_VacuumAlarm.lastmod.txt |
40 B |
8/5/2020, 11:47:12 AM |
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Growth module.GM1_VacuumAlarm.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
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Growth module.GrowthStage.Occupied.txt |
72 B |
8/5/2020, 11:47:12 AM |
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Growth module.LotNumber.txt |
40 B |
8/5/2020, 11:47:12 AM |
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Growth module.Manipulator.AtHomePosition.txt |
10.2 KB |
8/5/2020, 11:47:12 AM |
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Growth module.ModuleIsAtVacuum.txt |
110 B |
8/5/2020, 11:47:12 AM |
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Growth module.ModuleIsBusy.txt |
80 B |
8/5/2020, 11:47:12 AM |
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Growth module.OkToOpenSlitValve.txt |
80 B |
8/5/2020, 11:47:12 AM |
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Growth module.RetractAndLockForTransfer.txt |
109 B |
8/5/2020, 11:47:12 AM |
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Growth module.SequenceIndex.txt |
49 B |
8/5/2020, 11:47:12 AM |
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Growth module.SlitValve.Authority.txt |
81 B |
8/5/2020, 11:47:12 AM |
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Growth module.SlitValve.Get.txt |
87 B |
8/5/2020, 11:47:12 AM |
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Growth module.SlitValve.Set.txt |
72 B |
8/5/2020, 11:47:12 AM |
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Growth module.StageAtHome.txt |
162 B |
8/5/2020, 11:47:12 AM |
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Growth module.StageHomeSensor.txt |
87 B |
8/5/2020, 11:47:12 AM |
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Growth module.Teach.Get.txt |
49 B |
8/5/2020, 11:47:12 AM |
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Growth module.Transfer.Cmd.txt |
353 B |
8/5/2020, 11:47:12 AM |
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Growth module.Transfer.LastCmdStatus.txt |
226 B |
8/5/2020, 11:47:12 AM |
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Growth module.Transfer.TargetShelf.txt |
47 B |
8/5/2020, 11:47:12 AM |
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Growth module.Transfer.TransferStatus.txt |
290 B |
8/5/2020, 11:47:12 AM |
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GrowthBake.Derivative.txt |
40 B |
8/5/2020, 11:47:12 AM |
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GrowthBake.DeviceMax.txt |
47 B |
8/5/2020, 11:47:12 AM |
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GrowthBake.DeviceMin.txt |
40 B |
8/5/2020, 11:47:12 AM |
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GrowthBake.Integral.txt |
40 B |
8/5/2020, 11:47:12 AM |
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GrowthBake.Measured.txt |
50.56 KB |
8/5/2020, 11:47:12 AM |
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GrowthBake.OutputPercent.txt |
41 B |
8/5/2020, 11:47:12 AM |
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GrowthBake.Proportional.txt |
40 B |
8/5/2020, 11:47:12 AM |
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GrowthBake.RampRate.txt |
40 B |
8/5/2020, 11:47:12 AM |
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GrowthBake.Setpoint.txt |
41 B |
8/5/2020, 11:47:12 AM |
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GrowthBake.WorkingSetpoint.txt |
41 B |
8/5/2020, 11:47:12 AM |
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GrowthBake_AutoMode.Value.txt |
84 B |
8/5/2020, 11:47:12 AM |
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GrowthBake_LoopBreak.Value.txt |
79 B |
8/5/2020, 11:47:12 AM |
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GrowthBake_SensorBreak.Value.txt |
85 B |
8/5/2020, 11:47:12 AM |
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H2OPressureAlarm.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
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H2OPressureAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
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H2OPressureAlarm.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
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H2OPressureAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
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H2OPressureAlarm.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
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H2O_pressure_low.Value.txt |
65 B |
8/5/2020, 11:47:12 AM |
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KCell_2ndSetpoint.Value.txt |
80 B |
8/5/2020, 11:47:12 AM |
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LN2_OpenValve.Value.txt |
66 B |
8/5/2020, 11:47:12 AM |
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La_base.Derivative.txt |
47 B |
8/5/2020, 11:47:12 AM |
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La_base.DeviceMax.txt |
40 B |
8/5/2020, 11:47:12 AM |
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La_base.DeviceMin.txt |
40 B |
8/5/2020, 11:47:12 AM |
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La_base.Integral.txt |
40 B |
8/5/2020, 11:47:12 AM |
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La_base.Measured.txt |
32.37 KB |
8/5/2020, 11:47:12 AM |
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La_base.OutputPercent.txt |
129.95 KB |
8/5/2020, 11:47:12 AM |
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La_base.Proportional.txt |
40 B |
8/5/2020, 11:47:12 AM |
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La_base.RampRate.txt |
164 B |
8/5/2020, 11:47:12 AM |
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La_base.Setpoint.txt |
49 B |
8/5/2020, 11:47:12 AM |
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La_base.ShutterStatus.txt |
112 B |
8/5/2020, 11:47:12 AM |
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La_base.WorkingSetpoint.txt |
35.67 KB |
8/5/2020, 11:47:12 AM |
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Lambda10_EnableOutput.Value.txt |
65 B |
8/5/2020, 11:47:12 AM |
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Lambda10_LocalOrRemote.Value.txt |
67 B |
8/5/2020, 11:47:12 AM |
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Lambda11_EnableOutput.Value.txt |
65 B |
8/5/2020, 11:47:12 AM |
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Lambda11_LocalOrRemote.Value.txt |
67 B |
8/5/2020, 11:47:12 AM |
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Lambda13_EnableOutput.Value.txt |
65 B |
8/5/2020, 11:47:12 AM |
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Lambda13_LocalOrRemote.Value.txt |
67 B |
8/5/2020, 11:47:12 AM |
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Lambda14_EnableOutput.Value.txt |
65 B |
8/5/2020, 11:47:12 AM |
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Lambda14_LocalOrRemote.Value.txt |
67 B |
8/5/2020, 11:47:12 AM |
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Lambda2_EnableOutput.Value.txt |
65 B |
8/5/2020, 11:47:12 AM |
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Lambda2_LocalOrRemote.Value.txt |
67 B |
8/5/2020, 11:47:12 AM |
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Lambda4_EnableOutput.Value.txt |
65 B |
8/5/2020, 11:47:12 AM |
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Lambda4_LocalOrRemote.Value.txt |
67 B |
8/5/2020, 11:47:12 AM |
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Lambda5_EnableOutput.Value.txt |
65 B |
8/5/2020, 11:47:12 AM |
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Lambda5_LocalOrRemote.Value.txt |
67 B |
8/5/2020, 11:47:12 AM |
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Lambda7_EnableOutput.Value.txt |
65 B |
8/5/2020, 11:47:12 AM |
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Lambda7_LocalOrRemote.Value.txt |
67 B |
8/5/2020, 11:47:12 AM |
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Lambda8_EnableOutput.Value.txt |
65 B |
8/5/2020, 11:47:12 AM |
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Lambda8_LocalOrRemote.Value.txt |
67 B |
8/5/2020, 11:47:12 AM |
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Lambda9_EnableOutput.Value.txt |
65 B |
8/5/2020, 11:47:12 AM |
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Lambda9_LocalOrRemote.Value.txt |
67 B |
8/5/2020, 11:47:12 AM |
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LambdaPS1.Reading.txt |
42 B |
8/5/2020, 11:47:12 AM |
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LambdaPS10.Reading.txt |
51 B |
8/5/2020, 11:47:12 AM |
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LambdaPS10Current.Reading.txt |
42 B |
8/5/2020, 11:47:12 AM |
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LambdaPS11.Reading.txt |
51 B |
8/5/2020, 11:47:12 AM |
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LambdaPS11Current.Reading.txt |
1.5 KB |
8/5/2020, 11:47:12 AM |
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LambdaPS12.Reading.txt |
42 B |
8/5/2020, 11:47:12 AM |
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LambdaPS12Current.Reading.txt |
42 B |
8/5/2020, 11:47:12 AM |
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LambdaPS13.Reading.txt |
126.16 KB |
8/5/2020, 11:47:12 AM |
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LambdaPS13Current.Reading.txt |
127.36 KB |
8/5/2020, 11:47:12 AM |
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LambdaPS14.Reading.txt |
128.8 KB |
8/5/2020, 11:47:12 AM |
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LambdaPS14Current.Reading.txt |
128.68 KB |
8/5/2020, 11:47:12 AM |
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LambdaPS1Current.Reading.txt |
42 B |
8/5/2020, 11:47:12 AM |
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LambdaPS2.Reading.txt |
51 B |
8/5/2020, 11:47:12 AM |
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LambdaPS2Current.Reading.txt |
42 B |
8/5/2020, 11:47:12 AM |
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LambdaPS3.Reading.txt |
42 B |
8/5/2020, 11:47:12 AM |
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LambdaPS3Current.Reading.txt |
42 B |
8/5/2020, 11:47:12 AM |
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LambdaPS4.Reading.txt |
51 B |
8/5/2020, 11:47:12 AM |
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LambdaPS4Current.Reading.txt |
42 B |
8/5/2020, 11:47:12 AM |
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LambdaPS5.Reading.txt |
51 B |
8/5/2020, 11:47:12 AM |
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LambdaPS5Current.Reading.txt |
18.35 KB |
8/5/2020, 11:47:12 AM |
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LambdaPS6.Reading.txt |
42 B |
8/5/2020, 11:47:12 AM |
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LambdaPS6Current.Reading.txt |
42 B |
8/5/2020, 11:47:12 AM |
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LambdaPS7.Reading.txt |
128.24 KB |
8/5/2020, 11:47:12 AM |
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LambdaPS7Current.Reading.txt |
128.13 KB |
8/5/2020, 11:47:12 AM |
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LambdaPS8.Reading.txt |
54.69 KB |
8/5/2020, 11:47:12 AM |
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LambdaPS8Current.Reading.txt |
83.94 KB |
8/5/2020, 11:47:12 AM |
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LambdaPS9.Reading.txt |
51 B |
8/5/2020, 11:47:12 AM |
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LambdaPS9Current.Reading.txt |
24.46 KB |
8/5/2020, 11:47:12 AM |
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Main_Shutter.Value.txt |
71 B |
8/5/2020, 11:47:12 AM |
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Main_Shutter_Closed.Value.txt |
72 B |
8/5/2020, 11:47:12 AM |
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N2PressureAlarm.Status.txt |
88 B |
8/5/2020, 11:47:12 AM |
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N2PressureAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:12 AM |
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N2PressureAlarm.count.txt |
48 B |
8/5/2020, 11:47:12 AM |
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N2PressureAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:12 AM |
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N2PressureAlarm.state.txt |
48 B |
8/5/2020, 11:47:12 AM |
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N2_pressure_low.Value.txt |
73 B |
8/5/2020, 11:47:12 AM |
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Newzone.Derivative.txt |
48 B |
8/5/2020, 11:47:12 AM |
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Newzone.DeviceMax.txt |
48 B |
8/5/2020, 11:47:14 AM |
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Newzone.DeviceMin.txt |
48 B |
8/5/2020, 11:47:14 AM |
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Newzone.Integral.txt |
48 B |
8/5/2020, 11:47:14 AM |
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Newzone.Measured.txt |
50 B |
8/5/2020, 11:47:14 AM |
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Newzone.OutputPercent.txt |
49 B |
8/5/2020, 11:47:14 AM |
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Newzone.Proportional.txt |
48 B |
8/5/2020, 11:47:14 AM |
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Newzone.RampRate.txt |
48 B |
8/5/2020, 11:47:14 AM |
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Newzone.Setpoint.txt |
50 B |
8/5/2020, 11:47:14 AM |
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Newzone.WorkingSetpoint.txt |
50 B |
8/5/2020, 11:47:14 AM |
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O3Baratron1kTorr.Derivative.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3Baratron1kTorr.DeviceMax.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3Baratron1kTorr.DeviceMin.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3Baratron1kTorr.Integral.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3Baratron1kTorr.Measured.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3Baratron1kTorr.OutputPercent.txt |
49 B |
8/5/2020, 11:47:14 AM |
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O3Baratron1kTorr.Proportional.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3Baratron1kTorr.RampRate.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3Baratron1kTorr.Setpoint.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3Baratron1kTorr.WorkingSetpoint.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3Baratron20Torr.Derivative.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3Baratron20Torr.DeviceMax.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3Baratron20Torr.DeviceMin.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3Baratron20Torr.Integral.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3Baratron20Torr.Measured.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3Baratron20Torr.OutputPercent.txt |
49 B |
8/5/2020, 11:47:14 AM |
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O3Baratron20Torr.Proportional.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3Baratron20Torr.RampRate.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3Baratron20Torr.Setpoint.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3Baratron20Torr.WorkingSetpoint.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Baratron.Derivative.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Baratron.DeviceMax.txt |
47 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Baratron.DeviceMin.txt |
40 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Baratron.Integral.txt |
47 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Baratron.Measured.txt |
135.96 KB |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Baratron.OutputPercent.txt |
98.75 KB |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Baratron.Proportional.txt |
47 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Baratron.RampRate.txt |
87 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Baratron.Setpoint.txt |
219 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Baratron.WorkingSetpoint.txt |
671 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Baratron_Reading.Reading.txt |
136.15 KB |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Direct.Derivative.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Direct.DeviceMax.txt |
47 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Direct.DeviceMin.txt |
40 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Direct.Integral.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Direct.Measured.txt |
110.42 KB |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Direct.OutputPercent.txt |
88 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Direct.Proportional.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Direct.RampRate.txt |
48 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Direct.Setpoint.txt |
88 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_Direct.WorkingSetpoint.txt |
49 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_IonGauge.Derivative.txt |
47 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_IonGauge.DeviceMax.txt |
49 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_IonGauge.DeviceMin.txt |
50 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_IonGauge.Integral.txt |
47 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_IonGauge.Measured.txt |
34.06 KB |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_IonGauge.OutputPercent.txt |
12.11 KB |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_IonGauge.Proportional.txt |
47 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_IonGauge.RampRate.txt |
47 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_IonGauge.Setpoint.txt |
137 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_IonGauge.ShutterStatus.txt |
74 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_IonGauge.WorkingSetpoint.txt |
797 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_RGA.Derivative.txt |
47 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_RGA.DeviceMax.txt |
49 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_RGA.DeviceMin.txt |
40 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_RGA.Integral.txt |
47 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_RGA.OutputPercent.txt |
41 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_RGA.Proportional.txt |
47 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_RGA.RampRate.txt |
47 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_RGA.Setpoint.txt |
43 B |
8/5/2020, 11:47:14 AM |
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O3_Nozzle_RGA.WorkingSetpoint.txt |
43 B |
8/5/2020, 11:47:14 AM |
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Port4_RS_Vac.Reading.txt |
162.48 KB |
8/5/2020, 11:47:14 AM |
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Pyro.Reading.txt |
53.97 KB |
8/5/2020, 11:47:14 AM |
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QCM1_frequency.Reading.txt |
137 B |
8/5/2020, 11:47:14 AM |
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QCM1_rate.Reading.txt |
87.54 KB |
8/5/2020, 11:47:14 AM |
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QCM1_thickness.Reading.txt |
2.41 KB |
8/5/2020, 11:47:14 AM |
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QCM2_frequency.Reading.txt |
137 B |
8/5/2020, 11:47:14 AM |
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QCM2_rate.Reading.txt |
71.17 KB |
8/5/2020, 11:47:14 AM |
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QCM2_reset.Value.txt |
48 B |
8/5/2020, 11:47:14 AM |
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QCM2_thickness.Reading.txt |
1.31 KB |
8/5/2020, 11:47:14 AM |
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QCM_CalRate.Reading.txt |
60 B |
8/5/2020, 11:47:14 AM |
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QCM_Position.Derivative.txt |
40 B |
8/5/2020, 11:47:14 AM |
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QCM_Position.DeviceMax.txt |
40 B |
8/5/2020, 11:47:14 AM |
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QCM_Position.DeviceMin.txt |
47 B |
8/5/2020, 11:47:14 AM |
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QCM_Position.Integral.txt |
40 B |
8/5/2020, 11:47:14 AM |
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QCM_Position.Measured.txt |
52 B |
8/5/2020, 11:47:14 AM |
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QCM_Position.OutputPercent.txt |
49 B |
8/5/2020, 11:47:14 AM |
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QCM_Position.Proportional.txt |
47 B |
8/5/2020, 11:47:14 AM |
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QCM_Position.RampRate.txt |
48 B |
8/5/2020, 11:47:14 AM |
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QCM_Position.Setpoint.txt |
62 B |
8/5/2020, 11:47:14 AM |
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QCM_Position.WorkingSetpoint.txt |
52 B |
8/5/2020, 11:47:14 AM |
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QCM_PositionAlarm.Control.txt |
109 B |
8/5/2020, 11:47:14 AM |
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QCM_PositionAlarm.Status.txt |
88 B |
8/5/2020, 11:47:14 AM |
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QCM_PositionAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:14 AM |
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QCM_PositionAlarm.count.txt |
48 B |
8/5/2020, 11:47:14 AM |
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QCM_PositionAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:14 AM |
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QCM_PositionAlarm.state.txt |
55 B |
8/5/2020, 11:47:14 AM |
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QCM_Retracted.Value.txt |
84 B |
8/5/2020, 11:47:14 AM |
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Reactor_vacuum_OK.Value.txt |
72 B |
8/5/2020, 11:47:14 AM |
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RecipeCrossCheckAlarm.Status.txt |
88 B |
8/5/2020, 11:47:14 AM |
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RecipeCrossCheckAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:14 AM |
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RecipeCrossCheckAlarm.count.txt |
48 B |
8/5/2020, 11:47:14 AM |
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RecipeCrossCheckAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:14 AM |
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RecipeCrossCheckAlarm.state.txt |
48 B |
8/5/2020, 11:47:14 AM |
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Sc_base.Derivative.txt |
50 B |
8/5/2020, 11:47:14 AM |
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Sc_base.DeviceMax.txt |
50 B |
8/5/2020, 11:47:14 AM |
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Sc_base.DeviceMin.txt |
50 B |
8/5/2020, 11:47:14 AM |
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Sc_base.Integral.txt |
50 B |
8/5/2020, 11:47:14 AM |
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Sc_base.Measured.txt |
121.08 KB |
8/5/2020, 11:47:14 AM |
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Sc_base.OutputPercent.txt |
41 B |
8/5/2020, 11:47:14 AM |
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Sc_base.Proportional.txt |
40 B |
8/5/2020, 11:47:14 AM |
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Sc_base.RampRate.txt |
47 B |
8/5/2020, 11:47:14 AM |
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Sc_base.Setpoint.txt |
42 B |
8/5/2020, 11:47:14 AM |
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Sc_base.ShutterStatus.txt |
74 B |
8/5/2020, 11:47:14 AM |
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Sc_base.WorkingSetpoint.txt |
42 B |
8/5/2020, 11:47:14 AM |
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SetStageHome.Value.txt |
114 B |
8/5/2020, 11:47:14 AM |
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ShtrWagoAlarm.Status.txt |
88 B |
8/5/2020, 11:47:14 AM |
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ShtrWagoAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:14 AM |
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ShtrWagoAlarm.count.txt |
48 B |
8/5/2020, 11:47:14 AM |
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ShtrWagoAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:14 AM |
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ShtrWagoAlarm.state.txt |
55 B |
8/5/2020, 11:47:14 AM |
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ShutterClosedStatus.Reading.txt |
154 B |
8/5/2020, 11:47:14 AM |
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ShutterControl.Value.txt |
154 B |
8/5/2020, 11:47:14 AM |
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ShutterOpenStatus.Reading.txt |
168 B |
8/5/2020, 11:47:14 AM |
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SnO2_base.Derivative.txt |
49 B |
8/5/2020, 11:47:14 AM |
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SnO2_base.DeviceMax.txt |
51 B |
8/5/2020, 11:47:14 AM |
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SnO2_base.DeviceMin.txt |
51 B |
8/5/2020, 11:47:14 AM |
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SnO2_base.Integral.txt |
49 B |
8/5/2020, 11:47:14 AM |
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SnO2_base.Measured.txt |
9.29 KB |
8/5/2020, 11:47:14 AM |
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SnO2_base.OutputPercent.txt |
131.38 KB |
8/5/2020, 11:47:14 AM |
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SnO2_base.Proportional.txt |
40 B |
8/5/2020, 11:47:14 AM |
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SnO2_base.RampRate.txt |
47 B |
8/5/2020, 11:47:14 AM |
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SnO2_base.Setpoint.txt |
49 B |
8/5/2020, 11:47:14 AM |
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SnO2_base.WorkingSetpoint.txt |
49 B |
8/5/2020, 11:47:14 AM |
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SnO2_tip.Derivative.txt |
50 B |
8/5/2020, 11:47:14 AM |
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SnO2_tip.DeviceMax.txt |
50 B |
8/5/2020, 11:47:14 AM |
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SnO2_tip.DeviceMin.txt |
40 B |
8/5/2020, 11:47:14 AM |
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SnO2_tip.Integral.txt |
50 B |
8/5/2020, 11:47:14 AM |
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SnO2_tip.Measured.txt |
4.27 KB |
8/5/2020, 11:47:14 AM |
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SnO2_tip.OutputPercent.txt |
130.19 KB |
8/5/2020, 11:47:14 AM |
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SnO2_tip.Proportional.txt |
51 B |
8/5/2020, 11:47:14 AM |
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SnO2_tip.RampRate.txt |
47 B |
8/5/2020, 11:47:14 AM |
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SnO2_tip.Setpoint.txt |
49 B |
8/5/2020, 11:47:14 AM |
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SnO2_tip.ShutterStatus.txt |
111 B |
8/5/2020, 11:47:14 AM |
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SnO2_tip.WorkingSetpoint.txt |
49 B |
8/5/2020, 11:47:14 AM |
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Sr2_base.Derivative.txt |
40 B |
8/5/2020, 11:47:14 AM |
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Sr2_base.DeviceMax.txt |
40 B |
8/5/2020, 11:47:14 AM |
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Sr2_base.DeviceMin.txt |
50 B |
8/5/2020, 11:47:14 AM |
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Sr2_base.Integral.txt |
49 B |
8/5/2020, 11:47:14 AM |
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Sr2_base.Measured.txt |
39.26 KB |
8/5/2020, 11:47:14 AM |
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Sr2_base.OutputPercent.txt |
131.86 KB |
8/5/2020, 11:47:14 AM |
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Sr2_base.Proportional.txt |
50 B |
8/5/2020, 11:47:14 AM |
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Sr2_base.RampRate.txt |
47 B |
8/5/2020, 11:47:14 AM |
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Sr2_base.Setpoint.txt |
48 B |
8/5/2020, 11:47:14 AM |
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Sr2_base.WorkingSetpoint.txt |
48 B |
8/5/2020, 11:47:14 AM |
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Sr2_tip.Derivative.txt |
50 B |
8/5/2020, 11:47:14 AM |
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Sr2_tip.DeviceMax.txt |
50 B |
8/5/2020, 11:47:14 AM |
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Sr2_tip.DeviceMin.txt |
50 B |
8/5/2020, 11:47:14 AM |
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Sr2_tip.Integral.txt |
50 B |
8/5/2020, 11:47:14 AM |
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Sr2_tip.Measured.txt |
25.21 KB |
8/5/2020, 11:47:14 AM |
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Sr2_tip.OutputPercent.txt |
131.73 KB |
8/5/2020, 11:47:14 AM |
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Sr2_tip.Proportional.txt |
40 B |
8/5/2020, 11:47:14 AM |
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Sr2_tip.RampRate.txt |
47 B |
8/5/2020, 11:47:14 AM |
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Sr2_tip.Setpoint.txt |
48 B |
8/5/2020, 11:47:14 AM |
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Sr2_tip.ShutterStatus.txt |
111 B |
8/5/2020, 11:47:14 AM |
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Sr2_tip.WorkingSetpoint.txt |
48 B |
8/5/2020, 11:47:14 AM |
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Sr_base.Derivative.txt |
47 B |
8/5/2020, 11:47:14 AM |
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Sr_base.DeviceMax.txt |
40 B |
8/5/2020, 11:47:14 AM |
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Sr_base.DeviceMin.txt |
40 B |
8/5/2020, 11:47:14 AM |
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Sr_base.Integral.txt |
40 B |
8/5/2020, 11:47:14 AM |
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Sr_base.Measured.txt |
121.7 KB |
8/5/2020, 11:47:14 AM |
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Sr_base.OutputPercent.txt |
41 B |
8/5/2020, 11:47:14 AM |
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Sr_base.Proportional.txt |
40 B |
8/5/2020, 11:47:14 AM |
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Sr_base.RampRate.txt |
47 B |
8/5/2020, 11:47:14 AM |
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Sr_base.Setpoint.txt |
41 B |
8/5/2020, 11:47:14 AM |
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Sr_base.WorkingSetpoint.txt |
41 B |
8/5/2020, 11:47:14 AM |
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Sr_tip.Derivative.txt |
47 B |
8/5/2020, 11:47:14 AM |
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Sr_tip.DeviceMax.txt |
51 B |
8/5/2020, 11:47:14 AM |
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Sr_tip.DeviceMin.txt |
50 B |
8/5/2020, 11:47:14 AM |
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Sr_tip.Integral.txt |
40 B |
8/5/2020, 11:47:14 AM |
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Sr_tip.Measured.txt |
119.88 KB |
8/5/2020, 11:47:14 AM |
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Sr_tip.OutputPercent.txt |
41 B |
8/5/2020, 11:47:14 AM |
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Sr_tip.Proportional.txt |
40 B |
8/5/2020, 11:47:14 AM |
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Sr_tip.RampRate.txt |
47 B |
8/5/2020, 11:47:14 AM |
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Sr_tip.Setpoint.txt |
41 B |
8/5/2020, 11:47:14 AM |
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Sr_tip.ShutterStatus.txt |
74 B |
8/5/2020, 11:47:14 AM |
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Sr_tip.WorkingSetpoint.txt |
41 B |
8/5/2020, 11:47:14 AM |
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StageAtHome.Value.txt |
11.92 KB |
8/5/2020, 11:47:14 AM |
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StageUp.Value.txt |
84 B |
8/5/2020, 11:47:14 AM |
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Subs_2ndSetpoint.Value.txt |
80 B |
8/5/2020, 11:47:14 AM |
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Tb_base.Derivative.txt |
47 B |
8/5/2020, 11:47:14 AM |
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Tb_base.DeviceMax.txt |
51 B |
8/5/2020, 11:47:14 AM |
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Tb_base.DeviceMin.txt |
50 B |
8/5/2020, 11:47:14 AM |
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Tb_base.Integral.txt |
40 B |
8/5/2020, 11:47:14 AM |
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Tb_base.Measured.txt |
122.46 KB |
8/5/2020, 11:47:14 AM |
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Tb_base.OutputPercent.txt |
41 B |
8/5/2020, 11:47:14 AM |
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Tb_base.Proportional.txt |
40 B |
8/5/2020, 11:47:14 AM |
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Tb_base.RampRate.txt |
47 B |
8/5/2020, 11:47:14 AM |
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Tb_base.Setpoint.txt |
42 B |
8/5/2020, 11:47:14 AM |
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Tb_base.ShutterStatus.txt |
74 B |
8/5/2020, 11:47:14 AM |
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Tb_base.WorkingSetpoint.txt |
42 B |
8/5/2020, 11:47:14 AM |
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TiBall_Current.Reading.txt |
42 B |
8/5/2020, 11:47:14 AM |
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TiBall_EnableOutput.Value.txt |
65 B |
8/5/2020, 11:47:14 AM |
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TiBall_LocalOrRemote.Value.txt |
67 B |
8/5/2020, 11:47:14 AM |
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TiBall_Voltage.Reading.txt |
51 B |
8/5/2020, 11:47:14 AM |
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UtilityPower_ShutdownDelay1.Value.txt |
66 B |
8/5/2020, 11:47:14 AM |
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UtilityPower_ShutdownDelay1_Alarm.Status.txt |
88 B |
8/5/2020, 11:47:14 AM |
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UtilityPower_ShutdownDelay1_Alarm.ackd.txt |
49 B |
8/5/2020, 11:47:14 AM |
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UtilityPower_ShutdownDelay1_Alarm.count.txt |
48 B |
8/5/2020, 11:47:14 AM |
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UtilityPower_ShutdownDelay1_Alarm.lastmod.txt |
49 B |
8/5/2020, 11:47:14 AM |
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UtilityPower_ShutdownDelay1_Alarm.state.txt |
48 B |
8/5/2020, 11:47:14 AM |
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UtilityPower_ShutdownDelay2.Value.txt |
66 B |
8/5/2020, 11:47:14 AM |
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UtilityPower_ShutdownDelay2_Alarm.Status.txt |
88 B |
8/5/2020, 11:47:14 AM |
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UtilityPower_ShutdownDelay2_Alarm.ackd.txt |
49 B |
8/5/2020, 11:47:14 AM |
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UtilityPower_ShutdownDelay2_Alarm.count.txt |
48 B |
8/5/2020, 11:47:14 AM |
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UtilityPower_ShutdownDelay2_Alarm.lastmod.txt |
49 B |
8/5/2020, 11:47:14 AM |
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UtilityPower_ShutdownDelay2_Alarm.state.txt |
48 B |
8/5/2020, 11:47:14 AM |
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UtilityVoltageAlarm.Status.txt |
88 B |
8/5/2020, 11:47:14 AM |
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UtilityVoltageAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:14 AM |
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UtilityVoltageAlarm.count.txt |
48 B |
8/5/2020, 11:47:14 AM |
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UtilityVoltageAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:14 AM |
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UtilityVoltageAlarm.state.txt |
48 B |
8/5/2020, 11:47:14 AM |
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UtilityVoltagePresent.Value.txt |
65 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit1FlowAlarm.Status.txt |
88 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit1FlowAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit1FlowAlarm.count.txt |
48 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit1FlowAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit1FlowAlarm.state.txt |
48 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit1_flow_low.Value.txt |
65 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit2FlowAlarm.Status.txt |
88 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit2FlowAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit2FlowAlarm.count.txt |
48 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit2FlowAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit2FlowAlarm.state.txt |
48 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit2_flow_low.Value.txt |
65 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit3FlowAlarm.Status.txt |
88 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit3FlowAlarm.ackd.txt |
49 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit3FlowAlarm.count.txt |
48 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit3FlowAlarm.lastmod.txt |
49 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit3FlowAlarm.state.txt |
48 B |
8/5/2020, 11:47:14 AM |
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WaterCircuit3_flow_low.Value.txt |
65 B |
8/5/2020, 11:47:14 AM |
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_gm0_Monitor.txt |
81 B |
8/5/2020, 11:47:12 AM |
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_sc0_Monitor.txt |
151 B |
8/5/2020, 11:47:12 AM |
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_shtr0.Control.txt |
154 B |
8/5/2020, 11:47:12 AM |
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_shtr0.StatusClosed.txt |
154 B |
8/5/2020, 11:47:12 AM |
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eBeam_Emission.Reading.txt |
138.95 KB |
8/5/2020, 11:47:12 AM |
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eBeam_Filament.Reading.txt |
138.35 KB |
8/5/2020, 11:47:12 AM |
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eBeam_Mirror.Derivative.txt |
48 B |
8/5/2020, 11:47:12 AM |
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eBeam_Mirror.DeviceMax.txt |
48 B |
8/5/2020, 11:47:12 AM |
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eBeam_Mirror.DeviceMin.txt |
48 B |
8/5/2020, 11:47:12 AM |
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eBeam_Mirror.Integral.txt |
48 B |
8/5/2020, 11:47:12 AM |
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eBeam_Mirror.Measured.txt |
50 B |
8/5/2020, 11:47:12 AM |
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eBeam_Mirror.OutputPercent.txt |
49 B |
8/5/2020, 11:47:12 AM |
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eBeam_Mirror.Proportional.txt |
48 B |
8/5/2020, 11:47:12 AM |
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eBeam_Mirror.RampRate.txt |
48 B |
8/5/2020, 11:47:12 AM |
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eBeam_Mirror.Setpoint.txt |
50 B |
8/5/2020, 11:47:12 AM |
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eBeam_Mirror.WorkingSetpoint.txt |
50 B |
8/5/2020, 11:47:12 AM |
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eBeam_Setpoint.Value.txt |
41 B |
8/5/2020, 11:47:12 AM |
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reactor.Reading.txt |
184.81 KB |
8/5/2020, 11:47:14 AM |
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subs_center.Derivative.txt |
49 B |
8/5/2020, 11:47:14 AM |
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subs_center.DeviceMax.txt |
51 B |
8/5/2020, 11:47:14 AM |
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subs_center.DeviceMin.txt |
51 B |
8/5/2020, 11:47:14 AM |
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subs_center.Integral.txt |
49 B |
8/5/2020, 11:47:14 AM |
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subs_center.Measured.txt |
49 B |
8/5/2020, 11:47:14 AM |
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subs_center.OutputPercent.txt |
41 B |
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subs_center.Proportional.txt |
40 B |
8/5/2020, 11:47:14 AM |
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subs_center.RampRate.txt |
47 B |
8/5/2020, 11:47:14 AM |
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subs_center.Setpoint.txt |
42 B |
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subs_center.WorkingSetpoint.txt |
49 B |
8/5/2020, 11:47:14 AM |
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subs_center_slave.Derivative.txt |
40 B |
8/5/2020, 11:47:14 AM |
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subs_center_slave.DeviceMax.txt |
40 B |
8/5/2020, 11:47:14 AM |
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subs_center_slave.DeviceMin.txt |
50 B |
8/5/2020, 11:47:14 AM |
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subs_center_slave.Integral.txt |
49 B |
8/5/2020, 11:47:14 AM |
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subs_center_slave.Measured.txt |
49 B |
8/5/2020, 11:47:14 AM |
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subs_center_slave.OutputPercent.txt |
99 B |
8/5/2020, 11:47:14 AM |
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subs_center_slave.Proportional.txt |
50 B |
8/5/2020, 11:47:14 AM |
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subs_center_slave.RampRate.txt |
40 B |
8/5/2020, 11:47:14 AM |
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subs_center_slave.Setpoint.txt |
42 B |
8/5/2020, 11:47:14 AM |
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subs_center_slave.WorkingSetpoint.txt |
42 B |
8/5/2020, 11:47:14 AM |
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subs_rot.Derivative.txt |
40 B |
8/5/2020, 11:47:14 AM |
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subs_rot.DeviceMax.txt |
48 B |
8/5/2020, 11:47:14 AM |
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subs_rot.DeviceMin.txt |
47 B |
8/5/2020, 11:47:14 AM |
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subs_rot.Integral.txt |
48 B |
8/5/2020, 11:47:14 AM |
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subs_rot.Measured.txt |
124.42 KB |
8/5/2020, 11:47:14 AM |
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subs_rot.OutputPercent.txt |
49 B |
8/5/2020, 11:47:14 AM |
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subs_rot.Proportional.txt |
47 B |
8/5/2020, 11:47:14 AM |
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subs_rot.RampRate.txt |
87 B |
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subs_rot.Setpoint.txt |
683 B |
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subs_rot.WorkingSetpoint.txt |
124.31 KB |
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timeA.Reading.txt |
58 B |
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timeA_in.Value.txt |
58 B |
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timeB.Reading.txt |
58 B |
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timeB_in.Value.txt |
58 B |
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timeC.Reading.txt |
58 B |
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timeC_in.Value.txt |
58 B |
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timeCa.Reading.txt |
58 B |
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timeCa_in.Value.txt |
58 B |
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timeLa.Reading.txt |
58 B |
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timeLa_in.Value.txt |
58 B |
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timeMn.Reading.txt |
58 B |
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timeMn_in.Value.txt |
58 B |
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